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Femtosecond laser processing of ceria-based micro actuators
Journal article   an open version is available  Peer reviewed

Femtosecond laser processing of ceria-based micro actuators

Eran Mishuk, Jenny Shklovsky, Yuval Berg, Niv Vengerovsky, Tanmoy Paul, Zvi Kotler, Yoed Tsur, Yosi Shacham-Diamand, Slava Krylov and Igor Lubomirsky
Microelectronic engineering, Vol.217, 111126
15/Sep/2019
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AcceptedCC BY-NC-ND V4.0 Open Access

Abstract

Femtosecond laser MEMS Doped ceria Actuator Micromachining

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