Files and links (1)
AcceptedCC BY-NC-ND V4.0, Open Access
Journal article
Femtosecond laser processing of ceria-based micro actuators
Microelectronic engineering, Vol.217, 111126
15/Sep/2019
Abstract
In this paper we present a novel femtosecond laser micro-processing of gadolinium doped cerium oxide (CGO) taking advantage of the unique properties of the ultra-short laser pulse. The process can be extended to other materials which are incompatible with conventional deposition/patterning/etching processes. For example, CGO electrostrictive ceramics is lead-free and non-toxic, compatible with Si-microfabrication and exhibits large electrostriction effect at low frequencies. These qualities make CGO into a promising electroactive material for MEMS applications. However, conventional CGO lithography suffers from low yield due to metal shorts and due to damage during the etch and clean processes. Wet patterning of CGO is very difficult and often results in enhanced leakage or shorts between electrodes. These process compatibility issues can be avoided by using laser patterning. As a proof of concept, a precise patterning of electro-active ceramic Ce0.95Gd0.05O1.975 (CGO5) thin films (1.7 μm-thick) by femtosecond laser is demonstrated. The femtosecond laser patterning was used to fabricate double-clamped beam actuators made of CGO5 sandwiched between two metal contacts. The new process is studied and preliminary guide lines are presented. The process design rules are established; for example, a margin between the top contact edges and the CGO layer edges was defined prior to laser ablation to prevent a short-circuiting between top and bottom contacts due to metal ablation. Electro-mechanical testing of the resulting devices demonstrates the long-term mechanical and electrical endurance of 1.2 mm long beams. Using electrical excitation (voltage amplitude of 10 V with a carrier frequency of 10 MHz modulated at 10 Hz), actuation at 10 Hz induced an in-plane strain of 7×10−6 without any observable mechanical degradation for >800 k cycles. The processes presented in this work, therefore, provide a technological framework for integration of CGO into MEMS-devices.
Details
- Title
- Femtosecond laser processing of ceria-based micro actuators
- Creators
- Eran Mishuk - 972WIS_INST___98Jenny Shklovsky - Tel Aviv UniversityYuval Berg - Tel Aviv UniversityNiv Vengerovsky - Tel Aviv UniversityTanmoy Paul - Technion – Israel Institute of TechnologyZvi Kotler - OrbotechYoed Tsur - Technion – Israel Institute of TechnologyYosi Shacham-Diamand - Tel Aviv UniversitySlava Krylov - Tel Aviv UniversityIgor Lubomirsky (Corresponding Author) - 972WIS_INST___98
- Resource Type
- Journal article
- Publication Details
- Microelectronic engineering, Vol.217, 111126; 15/Sep/2019
- Number of pages
- 6
- Publisher
- Elsevier B.V
- Language
- English
- DOI
- https://doi.org/10.1016/j.mee.2019.111126
- Grant note
- This work was supported in part by the Israeli Ministry of Science and Technology grant #3-12944 and the BioWings project, which has received funding from the European Union's Horizon 2020 under the Future and Emerging Technologies (FET) program with a grant agreement No 801267. This research is made possible in part by the historic generosity of the Harold Perlman Family.
- Record Identifier
- 993249319303596
Metrics
14 File views/ downloads
28 Record Views